Automated SEM Analysis in Industrial Process Control and Scientific Research

While automated SEM analysis has been used for specific tasks such as gunshot residue analysis and technical cleanliness analysis for many years, recent advances in hardware and software make it a compelling proposition for a much wider group of researchers. Automated analysis in this context refers to solutions that enable users to define analysis tasks that are then carried out repeatedly, sometimes over large sample areas (Figure 1) or even multiple samples. The automation solution comprises control of the microscope stage, electron beam and the analysis equipment such as an EDS detector during a run as well as data reporting tools. Analysis areas are identified automatically based on user defined criteria involving sophisticated image processing. Data from both the EDS detector and imaging detectors containing both morphological and compositional information can then be combined to classify analysis areas according to set criteria.